English
钽舟真空蒸发制备高纯金属、合金和硅化物薄膜及其在大规模集成电路中的应用
张一平, 徐元森
TANTALUM BOAT USED AS SOURCE HEATER INVACUUM EVAPORATION OF PURE METALALLOYS AND SILICIDE FOR LSI
ZHANG YIPING, XU YUANSEN
应用科学学报 . 1989, (1): 47 -51 .