English
双离子注入增强退火效应的研究
朱锦良, 程东方, 王良, 蔡仁康
ENHANCED ANNEALING EFFECT OF DOUBLE ION IMPLANTED Si-SUBSTRATE
ZHU JINLIANG, CHENG DONGFANG, WANG LIANG, CAI RENKANG
应用科学学报 . 1989, (1): 57 -60 .