English
MOCVD装置的微机控制
翟其刚, 徐林木, 陈伟民, 俞光仪
A CONTROL SYSTEM BASED AN MICROCOMPUTER FOR MOCVD
ZHAI QIGANG, XU LINMUU, CHEN WEIMIN, YU GUANGYI
应用科学学报 . 1989, (2): 148 -152 .