电子束在胶层及衬底中散射轨迹的Monte Carlo模拟并从背散射系数看LB抗蚀层优越性
鲁武, 顾宁, 陆祖宏, 韦钰
MONTE CARLO SIMULATION OF ELECTRON BEAM SCATTERING TRAJECTORIES IN LB RESISTS AND SUBSTRATE AND THE SUPERIORITIES OF LB RESISTS FROM BACK-SCATTERED YIELD
LU WU, GU NING, LU ZUHONG, WEI YU
应用科学学报
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1995, (1): 29
-34
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