English
Co/Ti/Si三元薄膜固相反应外延CoSi2过程实验研究
吴卫军, 李炳宗, 邵凯, 房华
THE EXPERIMENTAL STUDY ON GROWTH PROCESS OF CoSi2/Si HETERO-EPITAXY By Co/Ti/Si MULTILAYER SOLID STATE REACTION
WU WEIJUN, LI BINGZONG, SHAO KAI, FANG HUA
应用科学学报 . 1996, (4): 403 -408 .