English
单轴各向异性薄膜参数的变厚度椭偏分析方法
朱荣, 韦钰
A NUMERICAL INVERSE METHOD FOR DETERMINING FILM PARAMETERS OF UNIAXIAL ANISOTROPIC FILM WITH ELLIPSOMETER
ZHU KONG, WEI YU
应用科学学报 . 1992, (1): 43 -48 .