English
XH-REP-2正性电子束抗蚀剂的工艺研究
王国荃, 罗腾蛟, 王琴美, 吴月莉
STUDY OF OPTIMAL PROCESSING FORXH-REP-2 POSITIVE ELECTRON-BEA MRESISTS
WANG GUOQUAN, LOU TENGJIAO, WANG QINMEI, WU YULI
应用科学学报 . 1994, (1): 88 -91 .