English
氧化工艺中影响SiO2薄膜驻极体性能的因素
林华茂, 夏钟福, 沈绍群
THE ELEMENTS OF OXIDE CONDITION WHICH INFLUENCE THE ELECTRET PROPERTIES OF THE THERMALLY WET-GROWN SiO2 FILMS
LIN HUAMAO, XIA ZHONGFU, SHEN SHAOQUN
应用科学学报 . 1997, (2): 143 -148 .