English
As2+注入硅的辐射损伤和退火行为研究
林成鲁, 方子韦, 邢昆山, 倪如山, 邹世昌
RADIATION DAMAGE AND ANNEALING BEHAVIOR OF As2+ IMPLANTED SILICON
LIN, FANG ZIWEI, XING KUNSHAN, NI BUSHAN, ZOU SHICHANG
应用科学学报 . 1990, (1): 1 -5 .