English
等离子体淀积薄膜中射频缺陷研究
李丹之, 赵冷柱, 劳凤英
INVESTIGATION OF DEFECTS INDUCED BY HIGH FREQUENCY IN PECVD PASSIVATION FILM
LI DANZI, ZHAO LENGCHU, LAO FENGYING
应用科学学报 . 1990, (3): 207 -212 .