SOCl<sub>2</sub>和CF<sub>4</sub>在光纤MCVD过程中脱氢反应的平衡计算

严一民, 郭祝昆, 张英华

EQUILIBRIUM CALCULATIONS ON THE HYDROGEN PARTITION OF SOCl₂ AND CF₄ IN MCVD SILICA SYSTEM

YAN YIMIN, KUO CHUKUN, ZHANG YINGHUA

应用科学学报 . 1988, (3): 255 -259 .