用于低阻半导体器件结电容测量的混频-锁相检测技术

王继元, 凌仲赓

MIX LOOKIN DETECTION TECHNIQUE FOR LOW RESISTANCE DEVICE JUNCTION CAPACITANCE MEASUREMENTS

WANG JIYUAN, LING CHENGENG

应用科学学报 . 1984, (1): 67 -74 .