English
硅与反应溅射二氧化硅界面特性的研究
张翔九, 胡际璜, 黄维宁, 姜国宝
INVESTIGATIONS OF THE CHARACTERISTICS OF THE INTERFACE BETWEEN SI AND REACTIVELY R.F.SPUTTERED SiO2
ZHANG XIANGJIU, HU JIHUANG, HUANG WEINING, JIANG GUOBAO
应用科学学报 . 1983, (4): 313 -318 .