Journal of Applied Sciences ›› 1985, Vol. 3 ›› Issue (2): 184-185.
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LI YUEZHEN, SHEN JINYUAN, REN NING, WANG QIMIN
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Abstract: A more accurate calibration curve at 78K for measuring the oxygen content in silicon single crystals has been established by the infrared absorption difference method. The resulting formula is N0=2.6α ppmA, or N0=1.3×1017α atoms/cm3 where α represents the IR absorption coefficient.
LI YUEZHEN, SHEN JINYUAN, REN NING, WANG QIMIN. 78 K INFRARED ABSORPTION METHOD FOR MEASURING THE OXYGEN CONTENT IN SILICON[J]. Journal of Applied Sciences, 1985, 3(2): 184-185.
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