Abstract: Using the photoelectrie effect of semiconductors (materials and devices), a new imaging detection system, photoelectric microscope, has been established. Some static and dynamic photoelectric imagings of several integrated circuits have been obtained by the microscope. Thee results show that the photoelectric microscope can be used not only to detect the static defects of various integrated circuits (including large scale integrated circuits), but also to search the logic levels and charges distributions in integrated circuits. It provides a convenient and effective, non-contacting and nondestructive technique that can be used in normal atmospheric circumstances for integrated circuits failure analysis.