Journal of Applied Sciences ›› 1988, Vol. 6 ›› Issue (3): 233-240.
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LI SIYUAN, YIN CHIPING, ZHANG TONGJUN, WANG YUZHEN, JIA XIAOTIAN
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Abstract: In this paper, the electrical effects of gold (Au) and platinum (Pt) at the Si-Al2O3 interface and the annealing behaviour of these effects tinder different annealing conditions are studied. The results of the photoelectron spectroscopy of the Si-Al2O3 system are presented also. Further, the action mechanism of Au and Pt at the interface is discussed.
LI SIYUAN, YIN CHIPING, ZHANG TONGJUN, WANG YUZHEN, JIA XIAOTIAN. THE ELECTRICAL EFFECTS OF GOLD AND PLATINUM AT THE Si-Al2O3 INTERFACE[J]. Journal of Applied Sciences, 1988, 6(3): 233-240.
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https://www.jas.shu.edu.cn/EN/Y1988/V6/I3/233
