Journal of Applied Sciences ›› 1989, Vol. 7 ›› Issue (1): 91-94.
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LI DANZHI
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Abstract: Based on the infrared strain distribution photo taken and the shape of spots on the Si wafer after thermal oxidation, this paper presents a model of strain conters. The model brings to light the minority carrier life dependence on strain centers and explains the improvement of transistor current gain due to the strain compensation of the double layer dielectric films.
LI DANZHI. A MODEL OF STRAIN CENTERS AND STRAIN COMPENSATION FOR DEVICE PASSIVATION[J]. Journal of Applied Sciences, 1989, 7(1): 91-94.
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