Journal of Applied Sciences ›› 1989, Vol. 7 ›› Issue (1): 91-94.

• Articles • Previous Articles    

A MODEL OF STRAIN CENTERS AND STRAIN COMPENSATION FOR DEVICE PASSIVATION

LI DANZHI   

  1. Branch School of Shanghai University of Science and Technology
  • Received:1987-10-14 Revised:1988-03-10 Online:1989-03-31 Published:1989-03-31

Abstract: Based on the infrared strain distribution photo taken and the shape of spots on the Si wafer after thermal oxidation, this paper presents a model of strain conters. The model brings to light the minority carrier life dependence on strain centers and explains the improvement of transistor current gain due to the strain compensation of the double layer dielectric films.