智能化150MHz反射式声学显微镜及声显微图像处理研究

Journal of Applied Sciences ›› 1993, Vol. 11 ›› Issue (3): 226-234.

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THE STUDY ON A 150 MHz INTELLIGENT REFLECTION SCANNING ACOUSTIC MICROSCOPE AND ITS IMAGE PROCESSING FUNCTION

CHEN GELIN, HU SIZHENG, LUO SHUYUN, ZHANG KEQIAN, SHEN ZHONGMING, XU ZHENGYTIAN

Tsinghua University

Received:1991-04-08 Revised:1991-11-09 Online:1993-09-30 Published:1993-09-30

Abstract

Abstract: Tne intelligent 150 MHz SAM is described in this paper. A current microcomputer is used as the central control part, the image being displayed on the terminal. The instrument has a high resolution on the surface and in the deep region of a structure, thus a structure of 20μm lateral dimension located at 5.1 mm from the surface can be observed. The microscope also possesses the function of image processing and of analysing specimen parameters. These facts show that the microscope is of practical value.

Key words: reflection, acoustic microscope, acoustic image processing, intelligent

CHEN GELIN, HU SIZHENG, LUO SHUYUN, ZHANG KEQIAN, SHEN ZHONGMING, XU ZHENGYTIAN. THE STUDY ON A 150 MHz INTELLIGENT REFLECTION SCANNING ACOUSTIC MICROSCOPE AND ITS IMAGE PROCESSING FUNCTION[J]. Journal of Applied Sciences, 1993, 11(3): 226-234.

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THE STUDY ON A 150 MHz INTELLIGENT REFLECTION SCANNING ACOUSTIC MICROSCOPE AND ITS IMAGE PROCESSING FUNCTION

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