Journal of Applied Sciences ›› 1993, Vol. 11 ›› Issue (4): 360-365.

• Research Notes • Previous Articles     Next Articles

INVESTIGATION ON PREPARATION OF SUB-MILLIMETER POLY-SILICON GEAR

ZHAO XINAN, SU YI, ZHANG XI, TAN SONGSHENG, WANG WEIYUAN   

  1. Shanghai Institute of Metallurgy, Academia Sinica
  • Received:1991-12-19 Revised:1992-09-27 Online:1993-12-31 Published:1993-12-31

Abstract: A poly-silicon micro-gear of 400μm in diameter and 5μm in thickness with a gap of 3.5μm between the gear and the shaft has been successfully fabricated by using 10 planar technology. A gear train of the same size is also given. And the influences of plasma etching conditions on the technology are discussed.

Key words: IC planar technology, micro-gear, plasma, etching, micro-machining technology