Abstract: Mechanical motion produces thermal deformation due to the friction. The thermal deformation depends on the shape, material and the surface residual stress of the element. In this paper we mainly discuss the influence of the surface residual stress on the thermal deformation of a simple geometric figure——a thick long cylinder, and we propose that influence of the thermal deformation can not be neglected in the super precision machining and nanometer technology.

Key words: geometric figure, thermal deformation, surface residual stress