Abstract: One-dimensional superlattice structure of In_1-x Al_xAs/GaAs has been comparatively researched by X-ray diffraction method from synchrotron radiation and CuKα radiation. The superlattice structural period Λ,and refraction index n are calculated from low angle X-ray diffraction data. The superlattice structural parameters have been determined from high angle X-ray diffraction data. The results from two X-ray sources have been compared and discussed. Raman scattering spectrum of this one-dimensional superlattice has been interpreted and 275cm^-1 peak which is absent in Ga_1-x Al_xAs/GaAs system has been found.

Key words: one-dimensional superlattice, X-ray diffraction, Raman scattering