Abstract: An improved Love equation (ML equation) of electron energy loss is presented. It not only retains love equation's analytical characteristic of deriving Bethe path by integration, but can also better describe the energy loss of electron in low energy region. With ML equation, the stopping power and range for electron in Al, Ag, An are calculated and compared with those from Love equation. By using Monte Carlo method and based on Mott cross section for elastic scattering of electron and ML or Love equation for energy loss of electron respectively, the scattering process of low energy electrons with energy E ≤ 5keV in solids is simulated. The calculated electron backscattering coefficients shows that the calculated results based on the ML equation are in agreement with experiments.

Key words: stopping power, low energy electron scattering, Monte Carlo method