Abstract: In this paper, theoretical analysis of inductivity-coupled microwave plasma source (ICP) is presented. According to its equivalent circuit, a planar microstrip spiral antenna with resonant frequency at 2.45GHz is designed. The antenna is simulated and optimized based on modeling, and the loss reduction method is proposed. The dimensions of coil are found to be the key factors having significant impact on resonance frequency and quality factor. Theoretical foundation is obtained for further research on low power planar spiral inductively-coupled microwave plasma source.

Key words: Inductively-coupled microwave plasma source (ICP), planar microstrip spiral antenna, numerical simulation