Abstract:

A locking damper based on the new functional materials, magnetorheological fluids, is studied. It can reduce vibration of driving motor and make a micro-impact locking for the working table. The magnetic circuit is simulated with finite element analysis and the property is calibrated using a reciprocating experimental system. It is used in Nano-CMM for nano-positioning experiments, showing that positioning steady-state fluctuation of the working table is reduced from 20 nm to less than 5 nm when the MRF locking damper is used. It ensures the nano-degree positioning steady-state fluctuation in Nano-CMM.

Key words: magnetorheological fluids, MRF locking damper, micro-impact locking, positioning, Nano-CMM