用于微纳米测量的磁流变阻尼固紧系统

Journal of Applied Sciences ›› 2010, Vol. 28 ›› Issue (1): 106-110.

• Control and System • Previous Articles

MRF Locking Damper for Micrometer/Nanometer Measurement

MA Wen-ping, YU Xiao-fen, CHENG Ling-li, YU Qing

School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China

Received:2009-09-17 Revised:2009-12-03 Online:2010-01-20 Published:2010-01-20

Abstract

Abstract:

A locking damper based on the new functional materials, magnetorheological fluids, is studied. It can reduce vibration of driving motor and make a micro-impact locking for the working table. The magnetic circuit is simulated with finite element analysis and the property is calibrated using a reciprocating experimental system. It is used in Nano-CMM for nano-positioning experiments, showing that positioning steady-state fluctuation of the working table is reduced from 20 nm to less than 5 nm when the MRF locking damper is used. It ensures the nano-degree positioning steady-state fluctuation in Nano-CMM.

Key words: magnetorheological fluids, MRF locking damper, micro-impact locking, positioning, Nano-CMM

CLC Number:

TB383

MA Wen-ping, YU Xiao-fen, CHENG Ling-li, YU Qing. MRF Locking Damper for Micrometer/Nanometer Measurement[J]. Journal of Applied Sciences, 2010, 28(1): 106-110.

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MRF Locking Damper for Micrometer/Nanometer Measurement

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