Abstract:

The touch trigger probe based on fiber Bragg gratings is a newly developed probe. With a sensing element used in a three-dimensional probe, sensor signal demodulation is a key technique. By means of the dual-frequency laser interferometer and nano-level stage, the sampling probe is tested using a self-demodulation approach based on the functional relations between optical power and wavelength shift. Resolution of more than 100 nm can be achieved from the analysis of experimental data on a developed probe. Furthermore, experiments verify that application of FBG sensors in a three-dimensional probe is feasible.

Key words: metrology, touch trigger probe, fiber Bragg grating, self-demodulation, trigger principle