聚酰亚胺(PI)薄膜电容型湿度传感器的研制

Journal of Applied Sciences ›› 1993, Vol. 11 ›› Issue (1): 86-90.

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DEVELOPMENT OF POLYIMIDE FILM-BASED CAPACITIVE TYPE HUMIDITY SENSOR

LOU RUFANG¹, LU YUPING¹, BIAN WEIYONG¹, ZHU QINYANG², CHEN YUNAN², LI XIAOHONG², ZHANG JIANAN²

1. Shanghai Institute of Metallurgy, Academic Sinica;
2. Shanghai No.5 Watch Factory

Received:1991-02-20 Revised:1992-01-22 Online:1993-03-31 Published:1993-03-31

Abstract

Abstract: This paper describes a capacitive type relative humidity sensor made of polyimide film. The device is fabricated with standard 10 processing techniques. We find the response curve is almost linear over the whole range of relative humidity; sensor hysteresis and inaccuracy are lower than ±3% RH; and the response time for 63.2% of a step change in humidity is less than 15s. The stability in high humidity, effect of temperature on the response character and principle of operation are discussed.

Key words: humidity sensor, polyimide, film

LOU RUFANG, LU YUPING, BIAN WEIYONG, ZHU QINYANG, CHEN YUNAN, LI XIAOHONG, ZHANG JIANAN. DEVELOPMENT OF POLYIMIDE FILM-BASED CAPACITIVE TYPE HUMIDITY SENSOR[J]. Journal of Applied Sciences, 1993, 11(1): 86-90.

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DEVELOPMENT OF POLYIMIDE FILM-BASED CAPACITIVE TYPE HUMIDITY SENSOR

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