Journal of Applied Sciences ›› 1994, Vol. 12 ›› Issue (3): 227-232.

• Articles • Previous Articles     Next Articles

RESEARCH ON FORMING THE FILM OF AMORPHOUS SUPERLATTICE MULTILAYER STRUCTUREAND ITS PHOTOPROPERTIES

WU DINGXIANG, XU KEXI   

  1. Shanghai University of Science and Technology
  • Received:1992-03-27 Revised:1993-04-01 Online:1994-09-30 Published:1994-09-30

Abstract: In this article the photochemical reaction is introduced by using ArF excimer laser of wave length 193nm to decompose the feed gases Si2H6 and C2H2 for fabricating the a-Si:H/a-SiC:H film of the amorphous superlattice multilayer structure. The photoproperties of the quantum size effect,the ultraviolet absorption,etc of such a film are discussed.

Key words: Photochemical reaction, Superlattice, Quantum size effects