Journal of Applied Sciences ›› 1994, Vol. 12 ›› Issue (3): 227-232.
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WU DINGXIANG, XU KEXI
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Abstract: In this article the photochemical reaction is introduced by using ArF excimer laser of wave length 193nm to decompose the feed gases Si2H6 and C2H2 for fabricating the a-Si:H/a-SiC:H film of the amorphous superlattice multilayer structure. The photoproperties of the quantum size effect,the ultraviolet absorption,etc of such a film are discussed.
Key words: Photochemical reaction, Superlattice, Quantum size effects
WU DINGXIANG, XU KEXI. RESEARCH ON FORMING THE FILM OF AMORPHOUS SUPERLATTICE MULTILAYER STRUCTUREAND ITS PHOTOPROPERTIES[J]. Journal of Applied Sciences, 1994, 12(3): 227-232.
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https://www.jas.shu.edu.cn/EN/Y1994/V12/I3/227