Abstract: A new type of imaging detection system, confocal laser scanning microscope (OLSM), has been established, Using the optical confocal method, laminated imaging of three-dimensional reconstructions and quantitative measurements of structures with height differences can b& obtained. OLSM images, thus obtained, tend to have better resolution (spatial resolution is about 0.2/μm) and sharper contrast than those obtained with an optical microscope. Furthermore, OLSM haa the function of photoelectric imaging. The detection results of several integrated circuits are shown in this paper, which proves OLSM is a convenient, effective, noncontact and nondestructive detection system for the images and measurements of semiconductor materials and devices, as well as other samples Such as biological materials, etc.

Key words: scanning microscope, laser, confocal, integrated circuit