同时形成用于浅结器件的TiN<sub><i>x</i></sub>O<sub><i>y</i></sub>/TiSi<sub>2</sub>的热稳定性

THERMAL STABILITY OF SIMULTANEOUSLY FORMED TiN_xO_y/TiSi₂ FOR SHALLOW JUNCTION DEVICE APPLICATIONS

CHEN CUNLI, SONG HAIZHI, HUA WENYU

Journal of Applied Sciences . 1993, (3): 253 -257 .