English

应用科学学报 ›› 1983, Vol. 1 ›› Issue (1): 63-70.

• 论文 • 上一篇    下一篇

扫描电子显微镜在红外探测器材料分析中的应用

陈伯良, 俞锦陛, 丁素珍, 王行丰   

  1. 中国科学院上海技术物理研究所
  • 收稿日期:1981-09-30 出版日期:1983-03-31 发布日期:1983-03-31

APPLICATIONS OF SCANNING ELECTRON MICROSCOPE IN EXAMINATION OF INFRARED DETECTOR MATERIALS

CHEN BOLIANG, YU JINBI, DIN SUZHEN, WANG XINGFENG   

  1. Shanghai Institute of Technical Physics, Academia Sinica
  • Received:1981-09-30 Online:1983-03-31 Published:1983-03-31

PDF

77

被引次数

5

摘要： 用国产DX-3A型扫描电子显微镜分析红外探测器材料,可成功地检测线度10μm以下的碲镉汞中的富磅夹杂相和碲锡铅中的金属夹杂相.精密测量了Hg1-xCdxTe和Pb1-xSnxTe的微区组成,可分辨出△x/x>2%的横向组成不均匀性.也可相当精确地测量PbSnTe-PbTe异质外延层的厚度.

Abstract: In this paper some results from examining infrared detector materials using scanning electron microscope of type DX-3A (manufactured in China) are reported. Te-rich inclusions in HgCdTe and metal inclusions in PbSnTe have been detected successfully, the smallest dimension of which is ten micrometers. Precision determination of compositions of Hg1-xCdxTe and Pb1-xSnxTe crystals is made, and inho-mogeneity of △x/x>2% in a crystal wafer can be discriminated. The thieknees of hetero-epitaxial layer of PbSnTe-PbTe can also be determined.