半导体电磁测量中一个对偶积分方程组的形式解

应用科学学报 ›› 1988, Vol. 6 ›› Issue (1): 32-39.

半导体电磁测量中一个对偶积分方程组的形式解

戴显熹, 王昌平, 李洪芳, 黄静宜

复旦大学

收稿日期:1986-03-28 修回日期:1986-05-31 出版日期:1988-03-31 发布日期:1988-03-31

ON A FORMAL SOLUTION OF DUAL INTEGRAL EQUATION SYSTEM IN MEASUREMENT OF SEMICONDUCTORS

DAI XIANXI, WANG CHANGPING, LI HONGPANG, HUANG JINGYI

Fudan University

Received:1986-03-28 Revised:1986-05-31 Online:1988-03-31 Published:1988-03-31

摘要/Abstract

摘要： 本文提出一个半导体测量中对偶积分方程组,经适当的积分变换,实现其退耦;运用Schlömilch定理及适当变换,使二重积分方程化为一维的Fredholm方程,并获得严格的形式解,还提出一个判别法,并用以证明解的唯一性.此外还得到电流与转换函数的关系以及小r₀时的显式解.

Abstract: In this paper a dual integral equation system in the measurement of semiconductors is suggested. The system is decoupled to be an equation of double integral by an integral transformation.
According to Schlömilch theorem, the 2-dimensional problem is reduced to be a one dimensional Fredholm equation. An exact formal solution is obtained and a criterion is suggested to prove the uniqueness of the formal solution. In addition, the relation between the current and transformation function and explicit expression of solution for small r₀ are also derived.

戴显熹, 王昌平, 李洪芳, 黄静宜. 半导体电磁测量中一个对偶积分方程组的形式解[J]. 应用科学学报, 1988, 6(1): 32-39.

DAI XIANXI, WANG CHANGPING, LI HONGPANG, HUANG JINGYI. ON A FORMAL SOLUTION OF DUAL INTEGRAL EQUATION SYSTEM IN MEASUREMENT OF SEMICONDUCTORS[J]. Journal of Applied Sciences, 1988, 6(1): 32-39.