English

应用科学学报 ›› 1988, Vol. 6 ›› Issue (1): 78-85.

• 论文 • 上一篇    下一篇

铂-硅系复合电极的界面反应及电特性

李思渊, 贾笑天, 李寿嵩, 沈明智, 殷之平   

  1. 兰州大学
  • 收稿日期:1985-02-13 修回日期:1985-08-14 出版日期:1988-03-31 发布日期:1988-03-31

INTERFACIAL REACTIONS AND CHARACTERISTICS OF Pt-Si SYSTEM COMPLEX ELECTRODES

LI SIYUAN, JIA XIAOTIAN, LI SHOUSONG, SHEN MINGZHI, YIN ZHIPING   

  1. Lanzhou University
  • Received:1985-02-13 Revised:1985-08-14 Online:1988-03-31 Published:1988-03-31

PDF

75

被引次数

9

摘要： 本文对Al-Ti-Pt-Si、Al-Mo-Pt-Si、Al-Ti-Si等电极系统薄膜间的相互扩散和反应,利用电子能谱分析、扫描电镜、电学等方法进行了全面研究,并对相应的作用机制也进行了讨论.

Abstract: In this paper, interfacial reactions and characteristics of multi-layer metal filmson silicon surface such as Al-Ti-Pt-Si, Al-Mo-Pt-Si, Al-Ti-Si etc. are studied systematically. The results of electron spectroscopy analyses, scanning electron microscope and electrical methods of the layered structures are presented, and action mechanisms of these interface effects are discussed.