可控硅温度控制系统的控温精度研究

应用科学学报 ›› 1991, Vol. 9 ›› Issue (4): 347-353.

可控硅温度控制系统的控温精度研究

路治平, 薛志麟

中科院上海硅酸盐研究所

收稿日期:1988-12-18 修回日期:1989-07-08 出版日期:1991-12-31 发布日期:1991-12-31

AN APPROACH TO THE PRECISION OF TEMPERATURE CONTROL IN THE SCR TEMPERATURE CONTROL SYSTEM

LU ZHIPING, XUE ZHILIN

Shanghai Institute of Ceramics, Academia Sinica

Received:1988-12-18 Revised:1989-07-08 Online:1991-12-31 Published:1991-12-31

摘要/Abstract

摘要： 研究了小滞后情况下可控硅控温系统中干扰对炉温波动的影响,导出了炉温波动的数学表达式,分析了炉温波动与系统参数间的关系,并与实验结果进行了比较,为进一步提高系统的控温精度提供了理论依据.

关键词: 可控硅温度控制系统, 控温精度, 炉温波动公式

Abstract: This article studies the effect of the interference on the furnace temperature fluctuation in the SCR temperature control system at a lesser lag. The mathematical expressions of the furnace temperature fluctuation are derived, and the relationship between the furnace temperature fluctuation and the system parameters is analyzed. Then a comparison is made with the experimental results. It is hoped, that in this way, we can provide a theoretical basis for improving the precision of the temperature control system.

Key words: expression of the furnace temperature fluctuation, SCR temperature control system, precision of temperature control

路治平, 薛志麟. 可控硅温度控制系统的控温精度研究[J]. 应用科学学报, 1991, 9(4): 347-353.

LU ZHIPING, XUE ZHILIN. AN APPROACH TO THE PRECISION OF TEMPERATURE CONTROL IN THE SCR TEMPERATURE CONTROL SYSTEM[J]. Journal of Applied Sciences, 1991, 9(4): 347-353.