English

应用科学学报 ›› 1995, Vol. 13 ›› Issue (3): 333-338.

• 论文 • 上一篇    下一篇

不规则拐角电阻计算的保角映射方法

郝跃1, 曹文清2   

  1. 1. 西安电子科技大学;
    2. 南京电子技术研究所
  • 收稿日期:1993-07-26 修回日期:1994-04-06 出版日期:1995-09-30 发布日期:1995-09-30

THE CONFORMAL MAPPING METHOD FOR IRREGULAR CORNER RESISTANCES CALCULATIONS

HAO YUM1, CAO WENQING2   

  1. 1. Xidian University;
    2. Nanjing Besearch Institute of Electronics
  • Received:1993-07-26 Revised:1994-04-06 Online:1995-09-30 Published:1995-09-30

PDF

197

被引次数

4

摘要： 该文根据保角映射原理,对两端宽度不等的拐角电阻和宽度突变型薄膜电阻等效方数进行了计算,并给出了它们的拟合函数形式。对这两类不规则薄膜电阻等效方数的计算与实验结果进行了比较,其结果令人满意。

关键词: 集成电路, 薄膜电阻, 数值计算

Abstract: Based on conformal mapping,the following relations are deduced in this paper.1.The relation between the number of colner squares of the thin film resis-tances and the ratio of width beside the corners;2.The relation between the equi-valent number of squares of tape resistances whose width can change suddenly and the ratio of the width at its two sides.The calculations agree with the experimental results satisfactorily.

Key words: thinfilm resistance, integrated circuits, numericalcalculation