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应用科学学报 ›› 2003, Vol. 21 ›› Issue (4): 423-426.

• 论文 • 上一篇    下一篇

大面积HFCVD系统衬底温度场建模与分析

宋胜利1,2, 左敦稳1, 王珉1   

  1. 1 南京航空航天大学机电学院 江苏 南京 210016;
    2 南京工程兵工程学院 江苏 南京 210007
  • 收稿日期:2002-08-27 修回日期:2002-11-01 出版日期:2003-12-10 发布日期:2003-12-10
  • 作者简介:宋胜利(1966-),男,山东嘉祥人,讲师,博士生;左敦稳(1962-),男,安徽庐江人,教授,博导;王珉(1950-),男,安徽淮南人,教授,博导.
  • 基金资助:
    国家自然科学基金资助项目(50075039)

Modeling and Analyzing the Substrate Temperature Field in the Large Area Hot-Filament CVD System

SONG Sheng-li1,2, ZUO Dun-wen1, WANG Min1   

  1. 1. College of Mechanical and Electrical Engineering, NUAA, Nanjing 210016, China;
    2. Engineering Institute of Engineer's Corps, PLAUST, Nanjing 210007, China
  • Received:2002-08-27 Revised:2002-11-01 Online:2003-12-10 Published:2003-12-10

PDF

73

被引次数

24

摘要： 以大面积HFCVD系统为研究对象,应用传热学理论建立了衬底温度场模型.根据金刚石成膜过程中对衬底温度大小及均匀性的工艺要求,对影响衬底温度场的参数进行了优化设计.最后,应用灵敏度法综合分析了各参数对衬底温度场的影响程度.

关键词: 金刚石膜, 温度场, 热丝法化学气相沉积, 灵敏度

Abstract: In this paper, the substrate temperature field is modelled by using heat transfer theory to study the large area hot filament CVD system. In order to meet the requirement for proper magnitude and uniformity of the substrate temperature during the formation of the diamond film, the work to optimize the parameters of the substrate temperature field is performed. Sensitivity analysis is then used to search the key factor which deeply influences the substrate temperature field.

Key words: HFCVD, temperature field, diamond film, sensitivity

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