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应用科学学报 ›› 2010, Vol. 28 ›› Issue (1): 106-110.

• 控制与系统 • 上一篇    

用于微纳米测量的磁流变阻尼固紧系统

马文平， 余晓芬， 程伶俐， 余卿   

  1. 合肥工业大学仪器科学与光电工程学院，合肥230009
  • 收稿日期:2009-09-17 修回日期:2009-12-03 出版日期:2010-01-20 发布日期:2010-01-20
  • 作者简介:余晓芬，教授，博导，研究方向：精密测试技术及仪器、微纳米测量技术等，E-mail: yuxiaofen99@hotmail.com
  • 基金资助:

    国家自然科学基金(No.50775063)资助

MRF Locking Damper for Micrometer/Nanometer Measurement

MA Wen-ping, YU Xiao-fen, CHENG Ling-li, YU Qing   

  1. School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China
  • Received:2009-09-17 Revised:2009-12-03 Online:2010-01-20 Published:2010-01-20

PDF

1767

被引次数

14

摘要：

研究用新型功能材料——磁流变液制作阻尼固紧器，具有减小电机振动和实现微冲击固紧工作台的双重功能. 通过有限元分析对其磁路进行了仿真，并用往复运动实验系统对其性能进行了标定. 在纳米三坐标测量机上进行的纳米定位实验表明，加上磁流变阻尼固紧器后，工作台定位稳态波动从20 nm减小到5 nm以内，可实现纳米三坐标测量机纳米级定位稳态波动.

关键词: 磁流变液, 磁流变阻尼固紧器, 微冲击固紧, 定位, 纳米三坐标测量机

Abstract:

A locking damper based on the new functional materials, magnetorheological fluids, is studied. It can reduce vibration of driving motor and make a micro-impact locking for the working table. The magnetic circuit is simulated with finite element analysis and the property is calibrated using a reciprocating experimental system. It is used in Nano-CMM for nano-positioning experiments, showing that positioning steady-state fluctuation of the working table is reduced from 20 nm to less than 5 nm when the MRF locking damper is used. It ensures the nano-degree positioning steady-state fluctuation in Nano-CMM.

Key words: magnetorheological fluids, MRF locking damper, micro-impact locking, positioning, Nano-CMM

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