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应用科学学报 ›› 2010, Vol. 28 ›› Issue (2): 158-162.

• 信号与信息处理 • 上一篇    下一篇

光纤光栅测头信号解调方法及实验研究

丁邦宙，博士生，研究方向：仪器精度理论，E-mail: bangzhouding@126.com；费业泰，教授，博导，研究方向：坐标测量技术、精密仪器测量误差修正、微纳测试系统、仪器精度理论及应用、动态误差修正技术及动态精度理论等，E-mail: ytfei@hfut.edu.cn   

  1. 合肥工业大学仪器科学与光电工程学院，合肥230009
  • 收稿日期:2009-08-01 修回日期:2009-12-14 出版日期:2010-03-30 发布日期:2010-03-30
  • 作者简介:丁邦宙，博士生，研究方向：仪器精度理论，E-mail: bangzhouding@126.com；费业泰，教授，博导，研究方向：坐标测量技术、精密仪器测量误差修正、微纳测试系统、仪器精度理论及应用、动态误差修正技术及动态精度理论等，E-mail: ytfei@hfut.edu.cn邦宙，博士生，研究方向：仪器精度理论，E-mail: bangzhouding@126.com；费业泰，教授，博导，研究方向：坐标测量技术、精密仪器测量误差修正、微纳测试系统、仪器精度理论及应用、动态误差修正技术及动态精度理论等，E-mail: ytfei@hfut.edu.cn
  • 基金资助:

    国家自然科学基金(No.50627501)资助

Demodulation of Touch Trigger Probe Based on FBG with Experimental Study

  1. School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China
  • Received:2009-08-01 Revised:2009-12-14 Online:2010-03-30 Published:2010-03-30

PDF

1782

被引次数

5

摘要：

光纤布喇格光栅触发式测头是一种新型测头. 传感信号解调是光纤光栅作为敏感元件应用于测头的关键技术之一. 在光功率与波长漂移量函数关系的基础上，借助双频激光干涉仪、纳米级的微动平台对试制的测头进行FBG自解调实验. 结果表明，研制的测头分辨率达到100nm，验证了光纤布喇格光栅应用于触发式测头的可行性.

关键词: 计量学, 触发式测头, 光纤布喇格光栅, 自解调法, 触发原理

Abstract:


The touch trigger probe based on fiber Bragg gratings is a newly developed probe. With a sensing element used in a three-dimensional probe, sensor signal demodulation is a key technique. By means of the dual-frequency laser interferometer and nano-level stage, the sampling probe is tested using a self-demodulation approach based on the functional relations between optical power and wavelength shift. Resolution of more than 100 nm can be achieved from the analysis of experimental data on a developed probe. Furthermore, experiments verify that application of FBG sensors in a three-dimensional probe is feasible.

Key words: metrology, touch trigger probe, fiber Bragg grating, self-demodulation, trigger principle

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