Journal of Applied Sciences ›› 1991, Vol. 9 ›› Issue (3): 215-221.

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ARC CURRENT CONTROL SYSTEM OF ION SOURCE BASED ON SINGLE CHIP MICROCOMPUTER

ZHAI QIGANG, YU GUANGYI, XU LINMU, CHEN WEIMING   

  1. Shanghai Institute of Metallurgy, Academia Sinica
  • Received:1989-05-22 Revised:1990-06-27 Online:1991-09-30 Published:1991-09-30

Abstract: A control system of arc current of ION source has been designed and constructde by using a single chip microcomputer. This system transmits the information of the ION source by optical fibers from the very high voltage side to the ground voltage side. By optical communication, the part of the control system located on the ground voltage side is insulated from the very high voltage. This control system can be used to control the arc current of two different types of ION sources:the direct heating ION source and indirect heating ION source. The stability of the arc current of the ION source using this control system is less than ±1% (F. S.).

Key words: arc current of beam of ion, insulate from high voltage, voltage regulation for inductance load, signal transmission by optical fiber, single chip microcomputer