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Journal of Applied Sciences ›› 1997, Vol. 15 ›› Issue (1): 112-116.

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HYDROTHERMAL BaTiO3 THIN FILM AND ITS MICROSTRUCTURE ANALYSES

XU HUAPING1, XIN HUOPLNG1, LIN CHENGLU1, JIANG FUMING2, YIN QINGRUI2, MENG FANDE3   

  1. 1. State Key Laboratory of Functional Materials for Lnformatics Shanghai Institute of Metallurgy, Shanghai 200050;
    2. Laboratory of Inorganic Functional Materials Shanghai Institute of Ceramics, Shanghai 200050;
    3. Shanghai Institute of Iron and Steels, Shanghai 200409
  • Received:1995-03-07 Revised:1995-06-28 Online:1997-03-31 Published:1997-03-31

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Abstract: Polycrystalline BaTiO3 thin film has been synthesized on Ti-covered silicon substrate at low temperature of 160℃ by hydrothermal method. lts micr-ostructure was dense and homogeneous, with average grain size of about 100 nm by scanning electron microscopic (SEM) observations. It can be found that a multi-laver sructure has, been formed according to the comparisons on X-ray diffraction. (XRD) patterns, SEM morphologies and spread resitance profiles of the samples before and after rapid thermal annealing. And the multilayer structure of cubic BaTiO3 (a-BT)/amorphous BaTiOx (a-BT)/TIOx/Ti/Si has evolved into tetragonal BaTiO3/TiOx/Ti/TiSi/Si after annealing.

Key words: hydrothermal method, hydrothermal thin film, BaTiO3 thin film, microstructure