Abstract: The determination of the temperature distribution in the exposed region is something difficult since the size of the exposed region in laser assisted diffusion is only of the order 10 microns. Remote sensing of the temperature of the extrasmall areas in that exposed region is reported. The theoretical principle, experimental set-up and the experimental results are presented, and especially, the callibration of the temperature sensing system is discussed in detail.

Key words: laser assisted diffusion, laser assisted processing, measurement of temperature, semiconductor