Journal of Applied Sciences ›› 1997, Vol. 15 ›› Issue (4): 424-428.

• Articles • Previous Articles     Next Articles

THE RESEARCH OF InGaAs MSM-PD SCHOTTKY BARRIER ENHANCEMENT LAYER

ZHU HONGWEI, SHI CHANGXIN, CHEN YIXIN   

  1. Shanghai Jiao Tong University, Shanghai 200030
  • Received:1996-03-20 Revised:1996-09-27 Online:1997-12-31 Published:1997-12-31

Abstract: It is shown in this paper that the dark current of InGaAs MSM photodetectors can be greatly reduced with the structure of p-InGaAs Schottky barrier enhanccmcnt layer. Theoretical explanation is given and the lowest dark currents with the order of 10-11 A are obtained in our experiments.

Key words: photodetector, barrier enhancement layer