连续波激光诱导扩散区温度的不接触测量

Journal of Applied Sciences ›› 1997, Vol. 15 ›› Issue (4): 413-417.

• Articles • Previous Articles Next Articles

REMOTE SENSING OF THE TEMPERATURE OF THE EXPOSED REGION IN LASER ASSISTED DIFFUSION

LI ZHONGDONG, YE YUTANG, HONG YONGHE, YE JING, LI JIAXU

University of Electronic Science and Tech nology of China, Department of Opto-electronic Technology, Chengdu 610054

Received:1996-03-22 Revised:1996-06-21 Online:1997-12-31 Published:1997-12-31

Abstract

Abstract: The determination of the temperature distribution in the exposed region is something difficult since the size of the exposed region in laser assisted diffusion is only of the order 10 microns. Remote sensing of the temperature of the extrasmall areas in that exposed region is reported. The theoretical principle, experimental set-up and the experimental results are presented, and especially, the callibration of the temperature sensing system is discussed in detail.

Key words: laser assisted diffusion, laser assisted processing, measurement of temperature, semiconductor

LI ZHONGDONG, YE YUTANG, HONG YONGHE, YE JING, LI JIAXU. REMOTE SENSING OF THE TEMPERATURE OF THE EXPOSED REGION IN LASER ASSISTED DIFFUSION[J]. Journal of Applied Sciences, 1997, 15(4): 413-417.

Add to citation manager EndNote|Reference Manager|ProCite|BibTeX|RefWorks

URL: https://www.jas.shu.edu.cn/EN/

https://www.jas.shu.edu.cn/EN/Y1997/V15/I4/413

[1]	DONG Hongxia, GAO Hua, WANG Longsheng, YANG Yibiao, WANG Anbang. EDFA-Relaying Long-Haul Chaos Synchronization of Semiconductor Lasers Driven by a Common Signal [J]. Journal of Applied Sciences, 2022, 40(3): 361-371.
[2]	QIAO Lijun, YANG Qiang, CHAI Mengmeng, WEI Xiaojing, ZHANG Jianzhong, XU Hongchun, ZHANG Mingjiang. Progress in Chaotic Semiconductor Lasers [J]. Journal of Applied Sciences, 2020, 38(4): 595-611.
[3]	YI Yang-bo, SUN Wei-feng, SUN Zhi-lin, CHEN Chang, LU Sheng-li. A Novel 200V P-Channel Power MOSFET and the Process for the PDP Scan Driver IC [J]. Journal of Applied Sciences, 2004, 22(2): 162-166.
[4]	ZHAO Jia-bao, SHENG Zhao-han, WEI Tong-li. MR-CGS: A Minimal Residual CGS Method and Its Application in DDM [J]. Journal of Applied Sciences, 2000, 18(2): 143-147.
[5]	WANG MINGWANG, WEI TONGLI, LI YAO, XIAO ZHIXIONG. SOFTWARE FOR SIMULATION OF SEMICONDUCTOR DEVICE FOR LOW TEMPERATURE:SE-PISCES [J]. Journal of Applied Sciences, 1997, 15(3): 315-324.
[6]	MO YAOWU, WU WENHAI. INVESTIGATION OF THE PROPERTIES OF SMSC Cd_1-xMn_xTe CRYSTAL FILMS GROWNRFOM Te-RICH SOLUTION [J]. Journal of Applied Sciences, 1997, 15(1): 107-111.
[7]	MO YAOWU, WU WENHAI. THE INyESTIGATION OF INTERFACIAL STABILITY DURING Te SOLUTION GROWTH OF SMSC Cd_1-xMn_xTe [J]. Journal of Applied Sciences, 1996, 14(1): 78-85.
[8]	XIAO XUDONG, SHI DUFANG, CHEN SHAOHUA, HAN CAIYUAN. OPTICAL TOMOGRAPHY AND IMAGE PROCESSING SYSTEM FOR MEASURING 3D ASYMMETRIC FLUID FIELD [J]. Journal of Applied Sciences, 1995, 13(2): 136-142.
[9]	ZHANG XIUMIAO. THE INVERSION LAYER RESISTANCE IN INDUCED INVERSION LAYER SOLAR CELLS UNDER OPERATING CONDITIONS [J]. Journal of Applied Sciences, 1993, 11(1): 11-15.
[10]	WANG JIE, LU HONGQIANG, SHEN JUN, LI ZHESHEN, WANG JIANBAO, SHEN XIAOLIANG. GROWTH OF Zn_1-xMn_xSe FILMS BY HOT WALL EPITAXY ON GaAs SUBSTRATE [J]. Journal of Applied Sciences, 1992, 10(2): 161-166.
[11]	ZHENG QINGPING, ZHANG QIANLING, RUAN GANG, CHENG XIAO. THE TECHNOLOGY AND CHARACTERISTICS OF LDD MOSFET [J]. Journal of Applied Sciences, 1991, 9(4): 309-314.

REMOTE SENSING OF THE TEMPERATURE OF THE EXPOSED REGION IN LASER ASSISTED DIFFUSION

PDF

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 11

Recommended Articles

Metrics

Comments