Abstract: In this paper, the sputtering caused by fusion of α-particles in the first wall of C, W, Be, SiO and stainless steel (Fe_0.73Cr_0.18Ni_0.09) is investigated by using the Monte Carlo simulation, which is based on the binary collision approximation. The dependence of sputtering yields of the above-mentioned materials on the incident energy as well as the comparisons of results calculated with The Monte Carlo method with results from experiments are discussed. Under the condition of multi-energy a-particles bombardment, the sputtering yields, energy distribution, angular distribution and depth distribution of the origin of the sputtered particles, as well as the effect of incidence angle on sputtering yields are presented. The results show that under the same incident condition, the sputtering yield of stainless steel is higher than the yields of other materials, and that the yields of the rest are almost equal.

Key words: sputtering yield, cascade collision, computer simulation, Monte Carlo method