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应用科学学报 ›› 2009, Vol. 27 ›› Issue (4): 375-380.

• 信号与信息处理 • 上一篇    下一篇

用点渲染算法实现光刻胶显影过程的三维模拟

崔滨 万旺根 吴永亮 金龙存 杨晓东   

  1. 上海大学通信与信息工程学院，上海200072
  • 收稿日期:2008-09-01 修回日期:2009-02-25 出版日期:2009-07-30 发布日期:2009-07-30

Simulation of Point Based Rendering for Three Dimensional Lithography Development

  1. School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China
  • Received:2008-09-01 Revised:2009-02-25 Online:2009-07-30 Published:2009-07-30
  • About author: CUI Bin, Ph.D.candidate, research interests including geometric computing and visualization in science, E-mail: cuibin@shu.edu.cn; WAN Wang-gen, Ph.D., professor, research interests including audio signal processing, data mining and virtual reality, E-mail: wanwg@staff.shu.edu.cn
  • Supported by:

    the National Natural Science Foundation of China (No.60873130); the “863”National High-Tech Research and
    Development Program of China (No.2007AA01Z319); the Shanghai’s Key Discipline Development Program (No.J50104); Innovation Foundation for Graduate Student of Shanghai University (No.06820113)

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被引次数

2

摘要：

用顶点和面片三维显示光刻胶显影模拟结果的方法不支持海量数据. 为此提出基于层次结构的三维场景绘制点渲染算法，并引入网格插值法填补显影模拟中在光刻胶表面出现的空洞，用Dill算法、Kim模型和介质光线算法建立光刻显影模型. 实验结果表明，该方法能高效、精确、实时地绘制光刻显影模型输出的大规模海量数据.

关键词: 点渲染, 光刻显影, 层次细节结构

Abstract:

Simulation results are presented with vertices and polygons which did not adequately support display of complex scenes of point-cloud data when using traditional methods. Thus we use a hierarchical point-based representation algorithm for rendering, and introduce a mesh-interpolation algorithm to fill the gaps in the advance of the surface. Meanwhile, a model for lithography development based on the Dill algorithm, the Kim model and the ray algorithm is established. Experimental results show that the hierarchical point-based rendering algorithm is effective for the real-time realization of large-scale 3D visualization.

Key words: point based rendering, lithography development, level of detail hierarchy

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