高频离子源中应用等离子体及非等离子体化学反应对于引出金属离子的区别

应用科学学报 ›› 1987, Vol. 5 ›› Issue (1): 41-48.

高频离子源中应用等离子体及非等离子体化学反应对于引出金属离子的区别

白桂彬

北京师范大学

收稿日期:1985-03-29 修回日期:1985-08-21 出版日期:1987-03-31 发布日期:1987-03-31

THE DIFFERENCE BETWEEN METAL IONS EXTRACTED FROM THE R. F. ION SOURCE BY APPLYING PLASMA CHEMISTRY REACTION AND NON-PLASMA CHEMISTRY REACTION

BAI GUIBIN

Beijing Normal University

Received:1985-03-29 Revised:1985-08-21 Online:1987-03-31 Published:1987-03-31

摘要/Abstract

摘要： 文中介绍了高频离子源^[1]中应用等离子体化学反应与非等离子体中的化学反应对于引出金属离子束的区别.通过实验事实和分析,证明在引出金属离子方面,等离子体中的化学反应比非等离子体中的化学反应效果要好;等离子体化学反应在高频离子源中及离子注入机上得到运用,效果较好,有其特点.应用等离子体化学反应并结合物理手段较方便地获得了金属离子束,特别是解决了高挥发温度金属离子束的获得问题.已引出的离子有:Re⁺、W⁺、Mo⁺、Y⁺、Nd⁺、Pd⁺、Au⁺、Ta⁺、Ti⁺、Cr⁺、Ce⁺、Ag⁺、Fe⁺,Ca⁺、V⁺,Al⁺,Be⁺、Li⁺、Si⁺、Ga⁺、In⁺,Bi⁺等.

Abstract: The paper introduces the difference between using plasma chemistry reaction and non-plasma chemistry reaction to draw metal ions from the E. F. ion source. Plasma chemistry reaction is applied to the E. F. ion source and the implanter successfully. The effect, having its own characteristics, is very satisfying. By means of plasma chemistry reaction combined with physics, metal ion beams, especially the beams of high volatility temperature, are obtained easily. These ions are:Re⁺, W⁺, Mo⁺, Y⁺, Nd⁺, Pd⁺, Au⁺, Ta⁺, Ti⁺, Cr⁺, Ce⁺, Ag⁺, Fe⁺, Cu⁺, V⁺, Al⁺, Be⁺, Li⁺, Si⁺, Ga⁺, In⁺, Bi⁺ and so on.

白桂彬. 高频离子源中应用等离子体及非等离子体化学反应对于引出金属离子的区别[J]. 应用科学学报, 1987, 5(1): 41-48.

BAI GUIBIN. THE DIFFERENCE BETWEEN METAL IONS EXTRACTED FROM THE R. F. ION SOURCE BY APPLYING PLASMA CHEMISTRY REACTION AND NON-PLASMA CHEMISTRY REACTION[J]. Journal of Applied Sciences, 1987, 5(1): 41-48.