Abstract: Based on the normal IC process, micro machining technology and bonding technology, a novel micro flow-through cell pH-ISFET integrated sensor has been developed, which comprises micro flowthrough cell, four pair long-armed ISFET/REFET sensor (differential measurement) and Ti/Au film pseudo-reference electrode. The chip area and micro flow-through cell's Volumeare 8×6mm² and 0.7×5.0×0.3mm³, respectively. The integrated sensor together with extra peristaltic pump, injection valve and measurement circuits consists of micro flow-through cell pH-ISFET FIA (flow-injection analysis) system,Experimental results show that the integrated sensor and FIA system have fast response, small sample consumption, and other features and its stability and reliability are also ameliorated.

Key words: pH-ISFET integrated sensor, micro flow-through cell, Ti/Au film pseudo-reference electrode, ISFET/REFET structure, FIA system